Automated nanoliter solution deposition for total reflection X-ray fluorescence analysis of semiconductor samples |
| |
| Institution: | 1. Process Characterization Laboratory, ATDF, Austin, TX 78741, United States;2. Chemistry Division, Los Alamos National Laboratory, Los Alamos, NM 87545, United States;1. Department of Analytical Chemistry, Faculty of Science and Technology, University of the Basque Country (UPV/EHU), P.O. Box 644, 48080 Bilbao, Spain;2. Department of Applied Environmental Science (ITM), Stockholm University, SE-10691 Stockholm, Sweden;1. College of Information Science and Engineering, Northeastern University, Shenyang 110819, China;2. State Key Laboratory of Synthetical Automation for Process Industries, Northeastern University, Shenyang 110819, China;1. Graduate Institute of Medical Mechatronics, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan;2. Department of Mechanical Engineering, Chang Gung University, Taiwan;3. Department of Engineering and System Science, National Tsing Hua University, Taiwan;4. Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica and National Tsing Hua University, Taiwan;5. Research Center for Applied Sciences, Academia Sinica, Taiwan;1. Key Laboratory of Inorganic-Organic Hybrid Functional Material Chemistry, Ministry of Education, Tianjin Normal University, Tianjin 300387, China;2. Tianjin Key Laboratory of Structure and Performance for Functional Molecule, College of Chemistry, Tianjin Normal University, Tianjin 300387, China;3. Department of Chemistry and Biology, Rensselaer Polytechnic Institute (RPI), Troy, NY 12180, US;1. Measurement Science and Standards, National Research Council Canada, 1200 Montreal Road, M40, Ottawa, Ontario, Canada K1A 0R6;2. Institute for Frontier Materials, Deakin University, Waurn Ponds Campus, Geelong, Victoria 3220, Australia |
| |
| Abstract: | In this study, a BioDot BioJet dispensing system was investigated as a nanoliter sample deposition method for total reflection X-ray fluorescence (TXRF) analysis. The BioDot system was programmed to dispense arrays of 20 nL droplets of sample solution on Si wafers. Each 20 nL droplet was approximately 100 μm in diameter. A 10 × 10 array (100 droplets) was deposited and dried in less than 2 min at room temperature and pressure, demonstrating the efficiency of the automated deposition method. Solutions of various concentrations of Ni and Ni in different matrices were made from stock trace element standards to investigate of the effect of the matrix on the TXRF signal. The concentrations were such that the levels of TXRF signal saturation could be examined. Arrays were deposited to demonstrate the capability of drying 100 μL of vapor phase decomposition-like residue in the area of a typical TXRF detector. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
