IR detection by matrix isolation technique of radicals produced in a silane discharge |
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| Affiliation: | 1. Key Laboratory of Rural Energy Engineering in Yunnan Province, Yunnan Normal University, Kunming, 650500, PR China;2. State Key Lab of Optoelectronic Materials and Technologies, Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, PR China;3. Yunnan Key Lab of Opto-electronic Information Technology, Yunnan Normal University, Kunming, 650500, PR China;4. School of Future Technology, Henan Key Laboratory of Photovoltaic Materials, Henan University, Kaifeng, Henan, 475004, PR China;1. College of Chemistry and Materials Science, Sichuan Normal University, Chengdu, 610066, PR China;2. Mianyang Teacher''s College, Mianyang, 621000, PR China;1. Division of Physical Science (Physics), Faculty of Science, Prince of Songkla University, Hat Yai, Songkhla 90112, Thailand;2. Center of Excellence in Membrane Science and Technology, Prince of Songkla University, Songkhla 90112, Thailand;3. Faculty of Science and Technology, Nakhon Si Thammarat Rajabhat University, Nakhon Si Thammarat 80280, Thailand;4. Nuclear Technology Research and Development Center, Thailand Institute of Nuclear Technology (Public Organization), Nakornnayok 26120, Thailand;5. Center of Excellence in Plasma and Electromagnetic Wave, Walailak University, Thasala, Nakhon Si Thammarat, Thailand |
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| Abstract: | Infrared absorption spectra of free radicals trapped in a solid argon matrix, after extraction from a low pressure silane plasma hot cathode discharge, have been clearly observed. First partial results concerning the assignments of the detected absorption peaks and the energy dependence of neutral fragmentation pattern of silane by electron impact are presented and discussed. Matrix isolation technique appears to be a promising tool to characterize neutral species in discharges devoted to thin film deposition. |
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