Electron-beam lithography of cinnamate polythiophene films: conductive nanorods for electronic applications

We report the electron-beam induced crosslinking of cinnamate-substituted polythiophene proceeding via excited state [2+2]-cycloaddition. Network formation in thin films is evidenced by infrared spectroscopy and film retention experiments. For the polymer studied herin, the electron-stimulated process appears to be superior to photo (UV)-induced crosslinking as it leads to less degradation. Electron beam lithography (EBL) patterns cinnamate-substituted polythiophene thin films on the nanoscale with a resolution of around 100 nm. As a proof of concept, we fabricated nanoscale organic transistors using doped and cross-linked P3ZT as contact fingers in thin film transistors.

Electron beam lithography patterns selectively cinnamate-substituted polythiophene thin films via [2+2]-cycloaddition. A nanoscale organic field effect transistor is constructed using cross-linked and doped polythiophene as electrodes.