A general expression of the steady state composition for multicomponent system during ion sputtering |
| |
| Authors: | Qu Zhe |
| |
| Affiliation: | Institute of Metal Research, Academia Sinica, Shenyang, People''s Rep. of China |
| |
| Abstract: | A general expression of the steady state composition during sputtering has been derived based on the preferential sputtering model. The resulting formula has been applied to calculate the steady state concentration in a AgAuPd ternary system and the calculated values are in agreement, at least qualitatively, with the experimental data. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
