Crystalline effects on Auger emission; The influence of the electron channeling of the probe in scanning Auger microscopy

The modification of the Auger emission by the electron channelling of the probe is studied in silicon. An important effect is measured on the amplitude of the KLL Auger peak; the height of this peak is modified by a factor close to 2 when the channelling of the probe is changed using the rocking beam method. Due to the experimental conditions chosen, it is possible to interpret the results using the dynamical theory with two wave approximation.