Effect of ion bombardment at low energy on (100)InP surfaces,studied by Auger electron spectroscopy |
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| Authors: | B Achard B Gruzza C Pariset |
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| Institution: | Laboratoire de Physique des Milieux Condensés, UA CNRS No. 796, Université Clermont-Ferrand II, BP 45, F-63170 Aubière, France |
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| Abstract: | Surface cleaning of (100)InP substrates with an Ar+ ion beam of 250–400 eV is analysed by AES and shown as a function of time. The results obtained show the possibility of removing the contamination layer without any significant chemical damage to the InP surface. |
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