Noise-induced chaos in the electrostatically actuated MEMS resonators |
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Authors: | Wen-Ming Zhang Osamu TabataToshiyuki Tsuchiya Guang Meng |
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Affiliation: | a State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China b Department of Microengineering, Graduate School of Engineering, Kyoto University, Kyoto 606-8501, Japan |
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Abstract: | In this Letter, nonlinear dynamic and chaotic behaviors of electrostatically actuated MEMS resonators subjected to random disturbance are investigated analytically and numerically. A reduced-order model, which includes nonlinear geometric and electrostatic effects as well as random disturbance, for the resonator is developed. The necessary conditions for the rising of chaos in the stochastic system are obtained using random Melnikov approach. The results indicate that very rich random quasi-periodic and chaotic motions occur in the resonator system. The threshold of bounded noise amplitude for the onset of chaos in the resonator system increases as the noise intensity increases. |
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Keywords: | MEMS Resonator Electrostatic actuation Bounded noise Chaos |
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