Thermoelastic vibrations in micro-/nano-scale beam resonators with voids

In this paper the closed form expressions for the transverse vibrations of a homogenous isotropic, thermoelastic thin beam with voids, based on Euler-Bernoulli theory have been derived. The effects of voids, relaxation times, thermomechanical coupling, surface conditions and beam dimensions on energy dissipation induced by thermoelastic damping in (micro-electromechanical systems) MEMS/(nano-electromechanical systems) NEMS resonators are investigated for beams under clamped and simply supported conditions. Analytical expressions for deflection, temperature change, frequency shifts and thermoelastic damping in the beam have been derived. Some numerical results with the help of MATLAB programming software in case of magnesium like material have also been presented. The computer simulated results in respect of damping factor and frequency shift have been presented graphically.