激光功率密度对类金刚石膜结构性能的影响

采用大功率高重复频率准分子激光溅射热解石墨靶制备了类金刚石膜，研究了激光功率密度对膜的结构和性能的影响，分析了膜的紫外可见透过谱及膜的带隙结构、Raman谱和电子衍射图，结果表明随着激光功率密度由10⁸W／cm²提高至10¹⁰ W／cm²，膜的结构也由无定形非晶结构转变为纳米晶金刚石结构，膜 中的sp³键舍量及各项性能均有提高.关键词：激光功率密度类金刚石膜性能结构

Effect of the laser power density on the properties and structures of the diamond-like carbon films deposited by pulsed laser ablation of graphite

Diamond-like carbon films were deposited by high-frequency and high-power pulse d XeC1 excimer laser ablation of pyrolytic graphite targets in a high vacuum ch amber at room temperature. The effects of the laser power density on the propert ies and structures of the films were studied by setting the laser power density on the target at 10⁸, 10⁹ and 10¹⁰W/cm2. The optical transparency and the optical band gap as well as the electron diffraction patterns and Raman spectra of the films were investigated. The results demonstrated that the stru ctures of the films varied from amorphous to nanocrystalline diamond with the l aser power density increasing from 10⁸ to 10¹⁰W/cm2.