| 表面粗糙度的变波矢光散射测量方法的研究 |
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| 引用本文： | 程传福,亓东平,刘德丽.表面粗糙度的变波矢光散射测量方法的研究[J].光学学报,1999,19(7):006-1008. |
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| 作者姓名： | 程传福 亓东平 刘德丽 |
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| 作者单位： | 山东师范大学物理系,济南,250014 |
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| 摘 要： | 提出了表面粗糙度变波矢光散射测量方法，通过散射光强中心亮点光能量的参数ｌｎ，Ｅ随变化的线性关系来确定粗糙度ｗ，对６块粗糙度不同的硅片背面样品进行了实验测量。
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| 关 键 词： | 光散射 变波矢 粗糙度 |
| 收稿时间： | 1998/11/3 |
Light Scattering Measurement of Surface Roughness by Variable Wave Vectors |
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| Cheng Chuanfu,Qi Dongping,Liu Deli.Light Scattering Measurement of Surface Roughness by Variable Wave Vectors[J].Acta Optica Sinica,1999,19(7):006-1008. |
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| Authors: | Cheng Chuanfu Qi Dongping Liu Deli |
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| Abstract: | Based on the linear relationship between the logarithm of the central peak energy and k2⊥ in light scattering, a method for the measurement of surface roughness by changing the wave vectors is proposed. Experimental measurements of 6 samples of silicon backsides were conducted |
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| Keywords: | light scattering variable wave vectors surface roughness |
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