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Optimization of thermal conditions during crystal growth in a multi‐zone resistance furnace
Authors:K Lin  P Dold  KW Benz
Abstract:The thermal condition is one the of most important control parameters for crystal growth. In this paper we present an effective numerical method in detail for optimizing thermal conditions in multi‐zone crystal growth facilities, especially for crystal growth by the float zone (FZ) technique. A furnace function Ω is introduced to integrate the character of a growth furnace into a linear equation system. The desired power distribution can be therefore approached by solving the linear equation system iteratively. An expert systemlike algorithm has been developed in order to obtain a more suitable solution for practical applications. This method was used to investigate thermal parameters for experiments of SiGe/GeSi single crystal growth by the FZ technique. It is an individual program which can be combined with any commercial finite element/finite volume (FE/FV) program such as FIDAPTM.
Keywords:numerical simulation  inverse modeling  radiation heat transfer  float zone technique  Bridgman technique  FIDAP
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