Connection of Gibbs layer gatherings with rate of mass transfer upon deposition of thin films with presence of impurity |
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Authors: | A A Bochkarev V I Polyakova |
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Institution: | 1.Kutateladze Institute of Thermophysics, Siberian Branch,Russian Academy of Sciences,Novosibirsk,Russia |
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Abstract: | The Gibbs layer gatherings on the condensation front of silver vapor in the presence of water vapor are analyzed. The front
of condensation for analyzing the Gibbs concentration excess is calculated with the use of the modified Langmuir’s model of
sorption. At a fixed flow of silver vapor and temperature of the substrate, the water-vapor pressure varies. Calculations
have shown that the change of the water-vapor pressure changes the structure of the silver condensate, the structure of Gibbs
layers, and microroughness on the condensation front. As a consequence, the efficiency of mass transfer varies. With growth
of the water-vapor pressure, the condensation efficiency of both vapor components decreases. For obtaining the most equal
surface of condensed silver film there is an optimum water-vapor pressure. The results allow the influence of noncondensed
gas impurity on growth of thin films to be understood in greater detail and help to choose optimum modes for vacuum deposition.
A general conclusion regarding the connection of the Gibbs layers and microroughness of the condensation surface with the
intensity of mass transfer, leaving a framework of vacuum deposition processes, is drawn. |
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