| 复合静电聚焦—偏转系统的渐近象差 |
| |
| 引用本文： | 唐天同.复合静电聚焦—偏转系统的渐近象差[J].西安交通大学学报,1987(1). |
| |
| 作者姓名： | 唐天同 |
| |
| 作者单位： | 西安交通大学电子工程系 |
| |
| 摘 要： | 本文提出并讨论了复合聚焦——偏转系统的渐进象差概念,并推导了复合静电聚焦——偏转系统的一级渐进色差和三级渐近几何象差的公式.这些渐进象差系数均可表为物距X_0或放大率的倒数m 的多项式的形式,便于研究计算任意物象位置时的象差和设计计算带有多个聚焦——偏转器的静电电子和离子束探针系统.
|
| 关 键 词： | 渐进象差 复合聚焦——偏转系统 静电系统 电子光学 电子与离子束探针 |
ASYMPTOTIC ABERRATIONS OF COMBINED ELECTROSTATIC FOCUSING-DEFLECTION SYSTEMS |
| |
| Tang Tiantong.ASYMPTOTIC ABERRATIONS OF COMBINED ELECTROSTATIC FOCUSING-DEFLECTION SYSTEMS[J].Journal of Xi'an Jiaotong University,1987(1). |
| |
| Authors: | Tang Tiantong |
| |
| Institution: | Department of Electronic Engineering |
| |
| Abstract: | The concept of asymptotic aberrations of combined focusing-deflection
systems is discussed and the first-order asymptotic chromatic aberration and
the third-order geometrical aberration coefficients of a combined electrostatic
focusing-deflection system have been derived.Each of the aberration coeffi-
cients has been found to be expressed as polynomials in object distance or in
reciprocal of magnification.These formulas can be used to calculate the fo-
cusing-deflection aberrations of a combined electrostatic lens and in-lens def-
lector for any object-image position or to calculate or optimize the overall
aberrations of a complex electrostatic electron or ion beam probe system with
several lenses and in-lens deflectors. |
| |
| Keywords: | asymptotic aberration combined focusing-deflection system electrostatic system electron optics electron and ion beam probes |
| 本文献已被 CNKI 等数据库收录！ |
