用分级方法提高聚酯型光刻胶的质量

用熔融缩聚法含成的聚酯型光刻胶有较宽的分子量分布.为了获得较好的抗蚀性,需要提高样品的分子量.但此时常因增加了分子量的分布宽度而影响了样品的分辨率.用溶解一分级沉淀的方法对样品进行处理,除去样品中的高分子量和低分子量部份,所得到的中间级分的分辨率比原样品有明显提高.若仅将样品除去小分子量部份,对光敏性和抗蚀性亦有明显提高.文中还讨论了分级后样品分辨率提高的原因.

IMPROVE THE QUALITY OF POLYESTER TYPE PHOTORESISTS THROUGH GRADATION

The polyester type photoresists made by melt polycondensation have wide molecular weight distribution. For obtaining higher-resistivity it is necessarv o improve the molecular weight of a sample. But hence sample is unfavourably affected in its resolving power because the molecular weight distribution becomes wider. Through solution-gradation precipitation and removal of the parts darte with high and low molecular weight of the sample, the medium part of the sample will be obtained and possess better resolving power than the original. If only the part of low molecular weight of a sample is removed, the photosensivity and resistivity can be improved remarkably. The cause for the better resolving power of the sample after being graded is also discussed.