| 一种简易扩散泵封闭式加热器 |
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| 引用本文： | 王大庆,于冰,王超. 一种简易扩散泵封闭式加热器[J]. 分析测试技术与仪器, 1997, 3(2): 76-79 |
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| 作者姓名： | 王大庆 于冰 王超 |
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| 作者单位： | 中国矿业大学 |
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| 摘 要： | 介绍了一种用电镜扩散泵的封闭式加热器。它具有结构简单，安装及检修方便，成本低廉等特点，该装置适用于ＪＥＭ－２００ＣＸ电镜及ＪＥＥ－４Ｘ真空喷镀仪配置，近年来的使用证明该装置完全可以替代原装进口封闭式加热器。
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| 关 键 词： | 扩散泵 封闭式加热器 DP 电子显微镜 加热器 |
| 收稿时间： | 1997-02-06 |
| 修稿时间： | 1997-04-02 |
A Type of Simple Enclosed Heat Booster of Diffusion Pump |
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| Wang Daqing,Yu Bing and Wang Chao. A Type of Simple Enclosed Heat Booster of Diffusion Pump[J]. Analysis and Testing Technology and Instruments, 1997, 3(2): 76-79 |
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| Authors: | Wang Daqing Yu Bing Wang Chao |
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| Affiliation: | China University of Mining and Technology Xuzhou 221008 |
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| Abstract: | Introduced the development of the enclosed heat booster of diffusion pump using for TEM. The heat booster is characterized by its simplicity, convenience and lower cost. It's suitable for JEM-200CX TEM and JEE-4X Vacuum Evaporator. The application results show that it can completely take the place of the imported enclosed heat booster with original packaging. |
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| Keywords: | TEM diffusion pump enclosed heat booster |
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