Light Intensity Distribution in Laser Interference Crystallization by Using a Phase shift
Grating and Talbot Effect |
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| Authors: | JIANG Ming WANG Mingxiang WANG Mu CHEN Kunji |
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| Abstract: | Light intensity distribution in laser interference crystallization with an imperfect phase-shift grating is calculated and compared with that by a perfect one. The effect of zero-order defracted light on laser interference crystallization is analyzed in detail. The AFM images of a-Si:H film irradiated by a KrF excimer pulsed laser have confirmed our calculated results. Longitudinal periodicity of light intensity distribution is discussed and compared with the Talbot Effect. |
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| Keywords: | laser inteference crystallization phase shift grating Talbot Effect |
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