飞秒激光微加工中轴向超分辨相位板的设计及仿真

为了提高激光微加工质量，对激光焦斑进行整形，采用菲涅尔衍射公式进行了理论分析，基于遗传算法和设计约束条件通过Matlab设计了两种二元相位元件，0 结构四环相位板的归一化半径尺寸r1=0.15、r2=0.70、r3=0.81，非0 结构四环相位板的归一化半径尺寸为r1=0.25、r2=0.498、r3=0.652，从内到外各环对应的相位为2.879、3.087、0、3.012，采用这两种位相板调制后的纵向光斑大小可压缩至艾丽斑的76%和75%，峰值能量比分别为0.39和0.42，旁瓣能量分别为0.64和0.41，这两种相位板均可应用于飞秒激光微加工。

Design and simulation of axial super-resolved phase plate in femtosecond laser microfabrication

In order to improve the quality of laser micromachining, the focal spot should be shaped. The Fresnel diffraction formula was analyzed, two kinds of axial super-resolved phase plates were designed by using Matlab based on genetic algorithms and design constraints. The normalized radiuses of 0. structure phase plate of four-ring are r1=0.15、r2=0.70、r3=0.81, and the normalized radiuses of non.0. structure phase plate of four-ring are r1=0.25、r2= 0.498、r3=0.652, the phases of each ring from the inside to the outside are 2.879、3.087、0、3.012. The longitudinal spot sizes after using the two phase plates are compressible to 76% and 75% of the Airy pattern , the ratios of the peak energy are respectively 0.39 and 0.42, and sidelobe energy are respectively 0.64 and 0.41.Two phase plates can be applied in femtosecond laser microfabrication.