白宝石衬底上生长的MgxZn1-xO晶体薄膜的结构和光学性能

在白宝石（sapphire）衬底上低温外延生长出了Mg_xZn_1-xO晶体薄膜.x射线衍射（XRD）及能量色散x射线（EDX）分析表明，Mg_xZn_1-xO薄膜的晶体结构依赖于薄膜中Mg的组分x，随着Mg组分的增大，Mg_xZn_1-xO薄膜的结构从与ZnO晶体一致的六方结构转变为与MgO晶体一致的立方结构.对Mg_xZn_1-xO薄膜的紫外透 关键词： 电子束蒸发反应 xZn_1-xO晶体薄膜')" href="#">Mg_xZn_1-xO晶体薄膜 结构和光学性能

Structural and optical studies of MgxZn1-xO films grown on sapphire

Low-temperature epitaxy of Mg_xZn_1-xO thin films is achieved on sapphire substrates by the reactive electron beam evaporation. X-ray diffraction (XRD) and energy dispersive x-ray (EDX) analyses of the films demonstrate that the structure of Mg_xZn_1-xO depends upon the concentration of Mg in the films. With the increase of Mg concentration, the structure of Mg_xZn_1-xO changes from the wurtzite crystal structure of ZnO to the cubic one with lattice constant similar to that of MgO. By the measurements of UV-visible transmission and ultraviolet photoluminescence spectra of the Mg_xZn_1-xO films, it is found that the absorption band edge of Mg_xZn_1-xO is blue shifted obviously with the increase of Mg concentration, indicating the absorption band edge of Mg_xZn_1-xO becomes wider. However, the lattice mismatch between cubic Mg_xZn_1-xO film and MgO is small (0.16%).