|
|||||
|
|
Optimization of Composition,Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range |
|
| Authors: | Barysheva M M Garakhin S A Zuev S Yu Polkovnikov V N Salashchenko N N Svechnikov M V Smertin R M Chkhalo N I Meltchakov E |
| Institution: | 1.Institute for Physics of Microstructures, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia ;2.Laboratoire Charles Fabry, Institut d’Optique Graduate School, 91127, Palaiseau, France ; |
| Abstract: | Technical Physics - Broadband Mo/Si and Mo/Be multilayer stack-type mirrors for wavelength intervals of 11.1–13.8, 17–21, and 28–33 nm have been developed and fabricated. Uniform... |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |