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Low-Temperature Synthesis of α-SiC Nanocrystals |
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| Authors: | Nussupov K Kh Beisenkhanov N B Bakranova D I Keinbai S Turakhun A A Sultan A A |
| Institution: | 1.Kazakh–British Technical University, Almaty, Kazakhstan ; |
| Abstract: | Physics of the Solid State - Thick SiCx films have been deposited on a c-Si surface by radiofrequency (rf) magnetron sputtering (150 W, 13.56 MHz, Ar flow 2.4 L/h, 0.4 Pa) of graphite and silicon... |
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