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Impurity Effects on Nucleation and Growth of SiC Clusters and Layers on Si(100) and Si(111) |
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| Authors: | Pezoldt J Lubov M N Kharlamov V S |
| Institution: | 1.Technische Universität Ilmenau, Ilmenau, Germany ;2.St. Petersburg Academic University, St. Petersburg, Russia ;3.Ioffe Institute, St. Petersburg, Russia ; |
| Abstract: | Physics of the Solid State - A kinetic Monte Carlo model of silicon carbide growth on silicon surface is proposed. Based on this model, the growth of silicon carbide clusters on silicon in the... |
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