Deposition of ZnS thin film by ultrasonic spray pyrolysis: effect of thickness on the crystallographic and electrical properties

Zinc sulfide (ZnS) thin films have been deposited on Si (1 0 0) substrate using ultrasonic spray pyrolysis. X-ray diffraction (XRD) analysis revealed that the films are (0 0 2) preferentially oriented with c-axis-oriented wurtzite structure. The crystallinity has been found to improve with film thickness in the 180–6000 nm range. Film structure has been analyzed by XRD, scanning electron microscope, FTIR, and Raman spectroscopies, while the stoichiometry has been verified by energy-dispersive spectroscopy and particle-induced X-ray emission techniques. Electrical properties of the grown films were characterized by current–voltage and capacitance–voltage measurements where, the films show better conducting behavior at higher thickness.