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Influence of composition and molecular weight characteristics of methacrylic copolymers on their sensitivity to extreme ultraviolet radiation |
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| Authors: | S. A. Bulgakova I. P. Ivanov A. Ya. Lopatin L. M. Mazanova |
| Affiliation: | (1) Research Chemistry Institute, Nizhni Novgorod State University, Nizhni Novgorod, Russia;(2) Nizhni Novgorod State University, Nizhni Novgorod, Russia;(3) Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhni Novgorod, Russia |
| Abstract: | Binary and ternary copolymers of (meth)acrylic monomers of different chemical constitution are synthesized. The influence of the composition and molecular weight of copolymers on the sensitivity and contrast of resists based on them under exposure to extreme ultraviolet radiation (λ ～ 13 nm) is investigated. A resist having a radiation sensitivity of 0.6–1.0 mJ cm?2 and contrast coefficient γ = 1.5 is developed. |
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