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Dynamic measurement of oxygen diffusion in indium-tin oxide
Authors:J. Berger  I. Riess  D.S. Tannhauser
Affiliation:Department of Physics, Technion - Israel Institute of Technology, Haifa, Israel
Abstract:The diffusion of oxygen through an impervious ITO layer has been determined by measuring admittances in the range 5×10?5 -5 s?1. The results can be fit by a model which assumes simultaneous oxygen diffusion and generation. The diffusion coefficient does not depend noticeably on the oxygen pressure and has an activation energy comparable to that found for In2O3.
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