含轻元素二元合金成分的无标样X光能谱定量分析

本文对利用试样中不同元素X光强度相对比值分析成分的无标样定量分析方法提出了改进。首先对电子散射的“完全扩散”模型进行适当的修正和简化,得到标识X光的台阶状深度分布曲线,从而得到试样成分和标识X光强度的定量关系。对Cu-Si,FeS₂,NaCl和GaAs等二元合金的成分分析得到比较满意的结果。本文比较了用此法和Russ法(利用计算得到的纯元素标识X光强度因子并且经ZAF修正分析成分)得到的结果,表明用我们的方法分析的结果有所改善,计算程序也更简单。 关键词：

NO-STANDARDS QUANTITATIVE EDS ANALYSIS OF THE CONSTITUENTS OF BINARY ALLOYS CONTAINING LIGHT ELEMENTS

In this article, the no-standards quantitative analysis method using the ratios of the X-ray intensities of the elements in the samples has been improved. The "full diffusion" model of the electron scattering has been properly modified and simplified and a stepped depth distribution curve of the X ray has been obtained. From this distribution curve, the quantitative relationship between the constituents of samples and the intensities of the characteristic X-rays has been determined. The analysed values of the Cu-Si, FeS₂ NaCl and GaAs are coincident with the actual values. Our results are better in some extent than the results of Russ's method which used the calculated X-ray intensity factors of pure elements and the routine ZAF correction. The calculation procedure of our method is also simpler than the procedure of the latter method.