|
|||||
|
|
Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter |
|
| Authors: | Tong-Jin Park Hyeun-Seok Choi Chang-Soo Han Yong-Woo Lee |
| Institution: | a Department of Precision Mechanical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Republic of Korea;b Division of Mechanical and Information Management Engineering, Hanyang University, Sa-1 dong 1271, Sangnok-gu, Aansan-city, Gyeonggi-province 425-791, Republic of Korea;c LG Production Engineering Research Center, LG-PRC, 19-1 Cheongho-ri, Jinwuy-myun, Pyoungtaek-city, Gyeonggi-province 451-713, Republic of Korea |
| Abstract: | This paper proposes a robust discrete time Kalman filter (RDKF) for the dynamic compensation of nonlinearity in a homodyne laser interferometer for high-precision displacement measurement and in real time. The interferometer system is modelled to reduce the calculation of the estimator. A regulator is applied to improve the robustness of the system. An estimator based on dynamic modelling and a zero regulator of the system was designed by the authors of this study. For real measurement, the experimental results show that the proposed interferometer system can be applied to high-precision displacement measurement in real time. |
| Keywords: | Displacement measurement interferometer Real-time estimation Discrete time Kalman filter |
| 本文献已被 ScienceDirect 等数据库收录！ | |