Mechanical measurements of adhesion in microcantilevers: Transitions in geometry and cyclic energy changes |
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Authors: | E E Jones K D Murphy M R Begley |
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Institution: | (1) Department of Mechanical Engineering, University of Connecticut, 06269-3139 Storrs, CT;(2) Structural and Solid Mechanics Program, Department of Civil Engineering, University of Virginia, 22904-4742 Charlottesville, VA |
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Abstract: | Adhesion between initially separated components is a critical issue in microelectromechanical systems (MEMS), as it plays
an important role in determining device reliability and the forces (and energy) required for successful operation. In this
paper we outline a new approach for characterizing adhesion using microfabricated MEMS cantilevers, wherein transitions between
adhered geometries and the corresponding energy changes are quantified using an instrumented nanoindenter. The use of an instrumented
mechanical probe offers an important advantage over other techniques, in that the measured load-displacement response can
be used to directly quantify energy changes during changes in adhered geometry and cyclic loading. In addition, the adhered
portion of the system can be determined from the mechanical response of the beam, without having to view the system optically
as required via interferometric techniques. Experimental results are presented which detail the transitions from free-standing
cantilevers to arc-shaped and to s-shaped configurations. Measurements of the energy changes that occur under cyclic loading
are also presented. The experiments reveal interesting adhesion behaviors suggested by vastly different experiments reported
elsewhere, namely unstable transitions from one adhered geometry to another. The results are interpreted in the contexts of
beam theory and fracture mechanics models, which can be used to infer interfacial adhesion energy. |
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Keywords: | Adhesion mechanical measurement MEMS stiction |
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