| 微机构可调谐阵列滤光片的有限元分析 |
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| 引用本文： | 陈旻,刘旭,李海峰. 微机构可调谐阵列滤光片的有限元分析[J]. 光学学报, 2002, 22(3): 44-346 |
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| 作者姓名： | 陈旻 刘旭 李海峰 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室,杭州,310027,浙江大学微系统研究中心,杭州,310027 |
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| 基金项目： | 国家自然科学基金 (6 9976 0 2 6 ) |
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| 摘 要： | 提出一种新颖的采用薄膜技术在玻璃基底上构造微机可调谐二维窄带滤光片阵列的方法，在有限元分析的基础上，计算出器件在静电力作用下三维变曲面结果，并模拟了通过透光谱特性。
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| 关 键 词： | 微机构可调谐阵列滤光片 有限元分析 微器件 透过光谱特性 三维变形曲面 |
Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique |
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| Chen Min Liu Xu Li Haifeng The State Key Lab of Modern Optical Instrumentation,Zhejiang University,Hangzhou Research Center of Micro System,Zhejiang University,Hangzhou. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 44-346 |
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| Authors: | Chen Min Liu Xu Li Haifeng The State Key Lab of Modern Optical Instrumentation Zhejiang University Hangzhou Research Center of Micro System Zhejiang University Hangzhou |
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| Affiliation: | Received 12 January 2001; revised 20 April 2001 |
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| Abstract: | A new method is proposed to build a micromachined tunable optical filter array on glass base in visible band. The analysis result based on finite element shows that the optical performance is strongly influenced by the curved 3 D surface of the suspended electrostaticly driving layer. |
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| Keywords: | micro electronical mechanical system finite element filter array |
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