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蓝光相变光盘的多层膜结构设计
引用本文:刘波,阮昊,干福熹. 蓝光相变光盘的多层膜结构设计[J]. 光学学报, 2003, 23(12): 513-1517
作者姓名:刘波  阮昊  干福熹
作者单位:中国科学院上海光学精密机械研究所,上海,201800;中国科学院上海光学精密机械研究所,上海,201800;中国科学院上海光学精密机械研究所,上海,201800
基金项目:国家 8 63计划 (2 0 0 1AA3 13 0 10 ),上海市科学技术发展基金 (0 12 2 610 68)资助课题
摘    要:为了使光盘获得优良的记录/读出性能并能够长期稳定地使用,必须优化设计相变光盘的多层膜结构。采用自行设计的模拟分析相变光盘读出过程设计软件,从光学角度出发模拟计算了蓝光(405nm)相变光盘的膜层结构,研究了多层膜系的反射率和反射率对比度等光学参量与各层膜厚度和槽深的关系。研究得出的最佳多层膜结构为:下介电层/记录层/上介电层/反射层的厚度对于台记录为100nm/10nm/25nm,/60nm,而对于槽记录则为140nm/15nm/30nm,/60nm,槽深为50nm。模拟计算结果对于将来高密度蓝光相变光盘的制备具有一定的指导意义。

关 键 词:薄膜光学  相变光盘  蓝光  多层膜结构
收稿时间:2002-10-18

Design of the Multilayer Structure for Blue Laser Phase Change Optical Disk
Liu BoRuan HaoGan Fuxi. Design of the Multilayer Structure for Blue Laser Phase Change Optical Disk[J]. Acta Optica Sinica, 2003, 23(12): 513-1517
Authors:Liu BoRuan HaoGan Fuxi
Abstract:In order to make the optical disk having good recording/reading performance and long-term stability, the multilayer structure of the phase-change optical disk must be optimized. By using the design software capable of simulating and analyzing the reading process for phase-change optical disk design, a phase-change optical disk structure for the blue laser(405 nm) was designed optically. The relationships between the(multilayer′s) optical parameters(reflectivity and reflectivity contrast) and the film thickness of the structure and the depth of the groove are studied. The optimum structures of the phase-change optical disk are lower ZnS-SiO_2/AgInTeSb/upper ZnS-SiO_2/Al layered structure of 100 nm/10 nm/25 nm/60 nm for land recording and 140 nm/15 nm/30 nm/60 nm for groove recording. The depth of the groove is 50 nm. The simulation results have great instructional effect on the fabrication of the high density blue-ray phase-change optical disk in the future.
Keywords:film optics  phase change optical disk  blue laser  multilayer structure
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