Ridge Waveguide Electro-Optic Polymer Modulator with a New Kind of Corona Poled Crosslinkable Polyurethane

A polymer electro-optic modulator has been fabricated with thefunctional layer acting as a kind of corona poled crosslinkable polyurethane. The three optical layers, namely waveguide, photolithography and oxygen are fabricated by spin coating. With the Reactive Ion Etching method, the ridge of the waveguide is constructed. With light at 1.31μm being fiber coupled to waveguide, the mode and the modulation properties of these devices are demonstrated in a micron control system.