Boltzmann Equation Analysis of the Electron Gas in CF4 Discharge Plasma

The electron energy distribution function in CF₄ gas discharge was numerically calculated for density reduced electric field E/N = 15 - 300 × 10^?17 Vcm² using the Boltzmann kinetic equation. The momentum transfer and vibrational cross-sections were derived from available experimental swarm parameters while the cross-sections for inelastic electron-molecule collisional processes included were taken from the literature. The two-term spherical harmonic expansion of the distribution function was used in the calculations.