首页 | 本学科首页   官方微博 | 高级检索  
     检索      


Boltzmann Equation Analysis of the Electron Gas in CF4 Discharge Plasma
Authors:K Ma&#x;ek  L Lska  R D'Agostino  F Cramarossa
Institution:K. Ma?ek,L. Láska,R. D'Agostino,F. Cramarossa
Abstract:The electron energy distribution function in CF4 gas discharge was numerically calculated for density reduced electric field E/N = 15 - 300 × 10?17 Vcm2 using the Boltzmann kinetic equation. The momentum transfer and vibrational cross-sections were derived from available experimental swarm parameters while the cross-sections for inelastic electron-molecule collisional processes included were taken from the literature. The two-term spherical harmonic expansion of the distribution function was used in the calculations.
Keywords:
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号