Distinct orientation of AlN thin films deposited on sapphire substrates by laser ablation

We report the experimental characterization of the charged species produced in excimer laser ablation of a superconducting intermetallic compound (YNi₂B₂C). By using energy-selective time-of-flight mass spectrometry, we have obtained direct measurements of both mass spectra and kinetic energy distributions of ions. The investigation has been carried out in the laser fluence range 1-5 J cm^-2, which is typical of laser ablation thin film deposition. High kinetic energies of the charged component (up to 0.4 keV) have been observed even at moderate laser fluences.