Synthesis and characterization of volatile metal β-diketonate chelates of M(DPM)n (M=Ce, Gd, Y, Zr, n=3,4) used as precursors for MOCVD |
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| Authors: | Haizheng Song Yinzhu Jiang Changrong Xia Guangyao Meng Dingkun Peng |
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| Institution: | Department of Materials Science and Engineering, University of Science and Technology of China, Hefei, Anhui 230026, People's Republic of China |
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| Abstract: | High pure Ce(DPM)4, Gd(DPM)3, Y(DPM)3 and Zr(DPM)4 (DPM=dipivaloylmethanate=2,2,6,6-tetramethyl-3,5-heptanedionato) powders were successfully synthesized from inorganic salts and HDPM in ethanol/aqueous solution followed by recrystallization from toluene. Freshly prepared samples have been characterized by elemental analysis, X-ray diffraction, thermogravimetry-differential thermal analysis, nuclear magnetic resonance spectroscopy and fourier transform infrared spectroscopy. Aged samples, obtained by exposing fresh ones into air for 30 days, were also represented. Various structures, stabilities and volatilities result from different metal atoms and coordination numbers. Those metal β-diketonate chelates are served as precursors of metalorganic chemical vapor deposition for single and multi-component oxide thin films. |
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| Keywords: | A3 Metalorganic chemical vapor deposition A3 Thin films B1 β-diketonate chelates |
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