| 砷化镓单晶片抛光工艺研究 |
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| 引用本文： | 林本付,郭辉.砷化镓单晶片抛光工艺研究[J].信息技术与信息化,1997(2). |
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| 作者姓名： | 林本付 郭辉 |
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| 作者单位： | 淄博金晶电子材料厂 |
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| 摘 要： | 由于砷化镓（ＧａＡｓ）及其它化合物半导体具有很重要的作用，目前对它们的工艺研究越来越多。本文主要介绍了一种比较成熟的ＧａＡｓ单晶片抛光工艺。
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| 关 键 词： | 砷化镓单晶片，外延，平整度 |
The Polishing Technology Researches of GalliumArsenide Single Crystal Slices |
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| Lin Benfu Guo Hui.The Polishing Technology Researches of GalliumArsenide Single Crystal Slices[J].Information Technology & Informatization,1997(2). |
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| Authors: | Lin Benfu Guo Hui |
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| Institution: | Lin Benfu Guo Hui |
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| Abstract: | Because of the important roles of the GaAs and other compound semiconductors play , more and more researches hare been made to their technology. This paper mainly introduces a ripe polishing method to GaAs Single Crystal Slices. |
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| Keywords: | Galliunn arsenide single crystal slice Epitaxy Flatness |
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