| 离子束清洗在激光薄膜中的应用 |
| |
| 引用本文： | 张大伟,张东平,邵建达,王英剑,范正修,范瑞瑛.离子束清洗在激光薄膜中的应用[J].光学技术,2005,31(2):238-240. |
| |
| 作者姓名： | 张大伟 张东平 邵建达 王英剑 范正修 范瑞瑛 |
| |
| 作者单位： | 中国科学院,上海光学精密机械研究所,上海,201800;中国科学院,研究生院,北京,100864;中国科学院,上海光学精密机械研究所,上海,201800 |
| |
| 摘 要： | 介绍了在激光薄膜中End Hall型离子源离子束清洗的应用。通过实验验证了基片的二次污染和离子束的清洗效果,观测了离子束清洗前后基片的表面形貌变化。研究了用离子束清洗基片时对薄膜抗激光损伤阈值的作用。分析了用离子束清洗基片时其基片表面的性质,如清洁度、表面能、接触角、表面形貌的变化机理。指出了杂质微粒的去除和附着力的增加是如何使薄膜抗激光损伤阈值显著提高的。
|
| 关 键 词： | 激光薄膜 离子束清洗 离子源 损伤阈值 |
| 文章编号： | 1002-1582(2005)02-0238-03 |
| 修稿时间： | 2004年6月9日 |
The application of ion beam cleaning on the laser films |
| |
| ZHANG Da-wei,ZHANG Dong-ping,SHAO Jian-da,WANG Ying-jian,FAN Zheng-xiu,FAN Rui-ying.The application of ion beam cleaning on the laser films[J].Optical Technique,2005,31(2):238-240. |
| |
| Authors: | ZHANG Da-wei ZHANG Dong-ping SHAO Jian-da WANG Ying-jian FAN Zheng-xiu FAN Rui-ying |
| |
| Institution: | ZHANG Da-wei~ |
| |
| Abstract: | Using End-Hall ion source, the application of ion beam cleaning on the laser films is investigated. The re-contaminated phenomenon and ion cleaning effect are proved by experiments, and the modification of the substrate surface topography is observed. The effect of ion beam cleaning on the laser films is investigated. The mechanics of substrate surface characteristics modification, for example cleanness, surface energy, contact angle, and surface topography are analysed. It is concluded that the removal of impurity and the enhanced adhesion are contributed to the increase of laser-induced damage thresholds of films. |
| |
| Keywords: | laser films ion beam cleaning ion source laser-induced damage thresholds |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
