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Kinetics of the Conversion of Silicon Tetrachloride into Trichlorosilane Obtained through the Temperature Control along a Plug‐Flow Reactor |
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| Authors: | Nílson Kunioshi Yu Moriyama Akio Fuwa |
| Institution: | Graduate School of Creative Science and Engineering, Waseda University, Shinjuku 169–8555, Tokyo, Japan |
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