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Nanocrystalline ruthenium oxide and ruthenium in sensing applications – an experimental and theoretical study
Authors:Anette Salomonsson  Rodrigo M Petoral Jr  Kajsa Uvdal  Christian Aulin  Per-Olov Käll  Lars Ojamäe  Michael Strand  Mehri Sanati  Anita Lloyd Spetz
Institution:1. S-SENCE and Division of Applied Physic, Link?ping University, SE-581 83, Link?ping, Sweden
2. Division of Applied Physics and Sensor Science, Link?ping University, SE-581 83, Link?ping, Sweden
3. Physical and Inorganic Chemistry, Link?ping University, SE-581 83, Link?ping, Sweden
4. School of Technology and Design/Chemistry, V?xj? University, SE-351 95, V?xj?, Sweden
Abstract:In this project, we have explored RuO2 and Ru nanoparticles (∼ ∼10 and ∼ ∼5 nm, respectively, estimated from XRD data) to be used as gate material in field effect sensor devices. The particles were synthesized by wet chemical procedure. The capacitance versus voltage characteristics of the studied capacitance shifts to a lower voltage while exposed to reducing gases. The main objectives are to improve the selectivity of the FET sensors by tailoring the dimension and surface chemistry of the nanoparticles and to improve the high temperature stability. The sensors were characterized using capacitance versus voltage measurements, at different frequencies, 500 Hz to 1 MHz, and temperatures at 100–400°C. The sensor response patterns have been found to depend on operating temperature. X-ray photoelectron spectroscopy (XPS) analyses were performed to investigate the oxidation state due to gas exposure. Quantum-chemical computations suggest that heterolytic dissociative adsorption is favored and preliminary computations regarding water formation from adsorbed hydrogen and oxygen was also performed.
Keywords:nanoparticles  gas sensors  RuO2                Ru  FET devices
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