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Molecular mechanisms of aluminum oxide thin film growth on polystyrene during atomic layer deposition |
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| Authors: | Puttaswamy Manjunath Haugshøj Kenneth Brian Christensen Leif Højslet Kingshott Peter |
| Institution: | Interdisciplinary Nanoscience Centre (iNano), University of Aarhus, Ny Munkegade 1521-118, Aarhus C, 8000 Denmark. |
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| 本文献已被 PubMed 等数据库收录！ | |