分划板光坯返修工艺——返修分划板光坯的新夹具 |
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引用本文: | 宋余华. 分划板光坯返修工艺——返修分划板光坯的新夹具[J]. 光学技术, 1993, 0(1) |
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作者姓名: | 宋余华 |
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作者单位: | 扬州市曙光仪器厂 225001 |
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摘 要: | 本文介绍了几种新型的夹具,用来返修分划板光坯,克服了原来使用的夹具对玻璃不能很好地定位等缺点,并提出了返修过程中的一些注意事项。
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Retrorepair technology of reticel |
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Abstract: | This paper describes several new types of fixtures used to retrorepair reticle components, which have overcome the disadvantage that the reticle glass cannot be properly fined by the original fixture. Besides, it offers precautions during retrorepairs. |
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