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用线圈电流控制非平衡磁场，用汤森放电击穿形成深度自触发放电，用磁阱捕获放电形成的二次电子和导致漂移电流，形成了高功率非平衡磁控溅射放电。采用偏压为-100V相对磁控靶放置的圆形平面电极收集饱和离子电流；在距离磁控靶14cm的位置由Langmuir探针测量浮置电位；示波器测量磁控靶的脉冲电压、电流、浮置电位和饱和离子电流信号。装置的放电脉冲功率达到0.9MW，脉冲频率最大值为40Hz左右，空间电荷限制条件是控制电子电流和离子电流的主要机制。

Study of discharge properties and parameters of high power pulsed unbalanced magnetron sputtering

The deep extent discharge has been formed by spontaneous transcend discharge. The magnetic trap above target captures the second electrons leading to a drift current. A circular planar electron biased -100V opposite to target was used to measure saturation ion current. A Langmuir probe located at 14cm from target was used to measure floating potential. An oscilloscope was used to pick the pulsed signal of discharge voltage, current, float potential and saturation ion current. The pulsed discharge power reached above 0.9MW, and a peak frequency value is about 40Hz. The limited condition of space charge is the control mechanism for the electron current and ion current respectively.