| ECR微波放电氩离子输运过程的研究 |
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| 引用本文： | 钟晓霞,吴嘉达.ECR微波放电氩离子输运过程的研究[J].核聚变与等离子体物理,1998,18(4):31-36. |
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| 作者姓名： | 钟晓霞 吴嘉达 |
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| 作者单位： | 三束材料改性国家重点联合实验室复旦大学物理系 |
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| 基金项目： | 高等学校博士学科点专项科研基金,国家自然科学基金 |
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| 摘 要： | 建立了电子回旋共振（ＥＣＲ）微波放电等离子体中离子输运过程的蒙特卡罗模型，考虑了离子与中性原子的电荷交换碰撞和弹性碰撞，以及精确依赖于离子能量的电荷交换和动量转移截面，模拟了源于氩气ＥＣＲ微波放电的氩离子向衬底输运的过程，得到与实验报道相符的模拟结果。
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| 关 键 词： | 电子回旋共振 微波放电 氩离子 等离子体 输送 |
STUDY OF ARGON ION TRANSPORT IN ECR MICROWAVE DISCHARGES |
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| ZHONG,Xiaoxia,WU,Jiada,WU,Changzheng,LI,Fuming.STUDY OF ARGON ION TRANSPORT IN ECR MICROWAVE DISCHARGES[J].Nuclear Fusion and Plasma Physics,1998,18(4):31-36. |
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| Authors: | ZHONG Xiaoxia WU Jiada WU Changzheng LI Fuming |
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| Abstract: | A one dimensional Monte Carlo model to simulate the transport of ions in the downstream region of electron cyclotron resonance (ECR) microwave plasmas is established. The charge exchange, the momentum transfer between ions and neutral atoms, the dependence of their cross sections on the ion energy are taken into account. Argon ion transport processes in the down stream region from an ECR microwave discharge in argon gas are simulated. The simulation results are in good agreement with reported experimental measurements. |
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| Keywords: | Electron cyclotron resonance Microwave discharge Monte Carlo method Plasma |
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