Siliciding of titanium carbides with gaseous SiO

Titanium carbides of different stoichiometries were silicided with gaseous SiO at 1350°C. A mechanical mixture of silicon and silicon dioxide was used as a reaction source of SiO. Ti₃SiC₂, TiSi₂, and Ti₅Si₃ were the main reaction products, the phase composition of which strongly depended on the titanium carbide stoichiometry. The siliciding of carbides with a nearly stoichiometric carbon content resulted in the formation of Ti₃SiC₂, on the surface of which the other silicide phases, such as Ti₅Si₃ and TiSi₂, began to form. For titanium carbides with a low carbon concentration, Ti₅Si₃ was the only siliciding product.