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14.5GHz紧凑型、低成本、全永磁ECR离子源
引用本文:E.Galutschek,E.Salzborn,F.Aumayr,HP.Winter. 14.5GHz紧凑型、低成本、全永磁ECR离子源[J]. 中国物理 C, 2007, 31(Z1): 66-69
作者姓名:E.Galutschek  E.Salzborn  F.Aumayr  HP.Winter
作者单位:E.Galutschek(Institut für Allgemeine Physik,Vienna University of Technology,Vienna 1040,Austria) E.Salzborn(Institut für Atom-und Molekülphysik,Justus-Liebig University,Giessen 35390,Germany) F.Aumayr(Institut für Allgemeine Physik,Vienna University of Technology,Vienna 1040,Austria) HP.Winter(Institut für Allgemeine Physik,Vienna University of Technology,Vienna 1040,Austria)
基金项目:Supported by the Vienna University of Technology
摘    要:
A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed,with the plasma-confining magnetic field produced exclusively by permanent magnets.Microwave power of up to 175W in the frequency range from 12.75 to 14.SGHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner.The waveguide coupling system serves also as biased electrode,and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gas- mixing mode.A triode extraction system sustains ion acceleration voltages between 1kV and 10kV.The ECR ion source is fully computer-controlled and can be remotely operated from any desired location via Ethernet.

收稿时间:2007-05-30
修稿时间:2007-04-20

Compact,Low-Cost,14.5GHz All-Permanent Magnet Field ECR Ion Source
E.Galutschek,E.Salzborn,F.Aumayr,HP.Winter. Compact,Low-Cost,14.5GHz All-Permanent Magnet Field ECR Ion Source[J]. High Energy Physics and Nuclear Physics, 2007, 31(Z1): 66-69
Authors:E.Galutschek  E.Salzborn  F.Aumayr  HP.Winter
Abstract:
A compact 14.5GHz electron cyclotron resonance(ECR)ion source for the production of slow,multiply charged ions has been constructed,with the plasma-confining magnetic field produced exclusively by permanent magnets.Microwave power of up to 175W in the frequency range from 12.75 to 14.5GHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner.The waveguide coupling system serves also as biased electrode,and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gasmixing mode.A triode extraction system sustains ion acceleration voltages between lkV and 10kV.The ECR ion sonrce is fully computer-controlled and can be remotely operated from any desired location via Ethernet.
Keywords:low-cost compact ECRIS  all-permanent magnet ECRIS  ECRIS for multiply charged ions
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