Electron beam effects on oxygen exposed aluminum surfaces

The damaging effects of electron beams during the acquisition of electron spectra have long been an obstacle in surface analysis. In order to understand the physico-chemical processes which take place under electron irradiation in an AlO system, we have carried out an experiment in which artifices, such as heating, charging, and gas contamination, were absent. We have observed with Auger Electron Spectra increases of the oxidation extent and the oxygen concentration on an oxygen exposed (111) textured polycrystalline surface under electron irradiation (5 keV, 9 × 10^?5 A/cm²). These increases were not observed on a clean surface, and were very feeble on a (100) single crystal surface. The increase of oxygen concentration was independent of residual gas pressure (3 × 10^?9 to 6 × 10^?10 Torr) and its composition; and therefore cannot be explained by gas contamination during the experimental period (about 70 min). We attribute the increase of oxidation degree to the transition of chemisorbed oxygen atoms into oxide through direct momentum transfer from the incident electrons. We suggest that the increase of oxygen within the irradiated area is due to the surface diffusion of chemisorbed oxygen atoms from outside the irradiated area. These oxygen atoms are excited by the electrons scattered from the vacuum chamber walls and gain energy through Franck-Condon type mechanism. The absence of chemisorbed oxygen atoms on (100) surface explains the near absence of these increases on this surface.