辉光放电质谱法在无机非金属材料分析中的应用

辉光放电质谱法(GDMS)作为一种固体样品直接分析技术，已广泛应用于金属、半导体等材料的痕量和超痕量杂质分析。近年来，随着制样方法和离子源装置的改进，GDMS同样也能很好地应用于玻璃、陶瓷、氧化物粉末等非导体材料的成分分析。简介了GDMS的基本原理和分析特点，概述了GDMS在无机非金属材料分析的方法以及应用情况。

Analytical Applications of Glow Discharge Mass Spectrometry for Non-metal Inorganic Materials

As a direct solid sampling technique, glow discharge mass spectrometry (GDMS) has been widely applied to the trace element analysis of conductors and semi-conductors. DC-GDMS can also successfully analyze non-conductors such as glass, ceramics by mixing the sample with conductor or using the secondary cathode technique. The developing rf-powered GDMS gives more opportunities in the analysis of non-metal inorganic materials. In this paper, the basic theory and analytical characteristic of GDMS are briefly introduced. Applications of GDMS for analysing the non-metal inorganic materials have been reviewed.