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| 溶胶-凝胶法制备氧化铝光学薄膜 | |
| 引用本文： | 晏良宏,蒋晓东,江波.溶胶-凝胶法制备氧化铝光学薄膜[J].化学研究与应用,2008,20(7). |
| 作者姓名： | 晏良宏 蒋晓东 江波 |
| 作者单位： | 1. 中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900;四川大学化学学院,四川,成都,614004 2. 中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900 3. 四川大学化学学院,四川,成都,614004 |
| 摘 要： | 氧化铝薄膜性能优异,具有较高的介电常数、高热导率、抗辐照能力强、抗碱离子渗透能力强以及在很宽的波长范围内透明等性能。因此,氧化铝薄膜广泛地应用于微电子器件、电致发光器件、光波导器件以及抗腐蚀涂层等众多领域1]。特别是氧化铝光学薄膜具有高的抗激光损伤阈值2],用 |
| 关 键 词： | 氧化铝 光学薄膜 溶胶-凝胶 |
Preparation and properties of optical alumina coating by novel sol-gel method |
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| YAN Liang-hong,JIANG Xiao-dong,JIANG Bo.Preparation and properties of optical alumina coating by novel sol-gel method[J].Chemical Research and Application,2008,20(7). | |
| Authors: | YAN Liang-hong JIANG Xiao-dong JIANG Bo |
| Institution: | YAN Liang-hong1,2,JIANG Xiao-dong1,JIANG Bo2 |
| Abstract: | A sol-gel method for preparing optical alumina coatings was developed,in which the optical alumina coatings were prepared at room temperature,using ethanol as solvent,aluminium tri-sec-butoxide as precursor.The properties of the coatings were characterized with FTIR-spectroscope, UV-viso spectrophotometer,spectroscopic ellipsometry,scanning probe microscope.The results indicate that the surface roughness Rq and refractive index of the alumina coating was 0.61nm and 1.47 respectively,and the thickness of the coating was in the range 150.3~550.8nm. |
| Keywords: | alumina optical film sol-gel |
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