Equi-intensity spectroscopic ellipsometry with imperfect optical components |
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| Affiliation: | Zentralinstitut für Elektronenphysik der AdW der DDR, 1086 Berlin, Mohrenstrasse 40 41, DDR Germany;Mechanical & Design Engineering, Dublin Institute of Technology, Dublin 1, Ireland;School of Physical and Mathematical Sciences, Nanyang Technological University, 21 Nanyang Link, Singapore 637371, Republic of Singapore |
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| Abstract: | An ellipsometric method is described which allows the determination of optical constants, at low temperatures and outside the visible, from purely geometrical data (polarizer azimuths) even if imperfect polarizers, light source and detector are used. |
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