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Three-dimensional modelling of inductively coupled plasma torches
Authors:D. Bernardi  V. Colombo  E. Ghedini  A. Mentrelli
Affiliation:(1) Dipartimento di Ingegneria delle Costruzioni Meccaniche, Nucleari, Aeronautiche e di Metallurgia (DIEM) and Centro Interdipartimentale di Ricerca per le Applicazioni della Matematica (CIRAM), Università degli Studi di Bologna, Via Saragozza 8, 40123 Bologna, Italy, IT
Abstract:A three-dimensional model has been developed for simulating the behaviour of inductively coupled plasma torches (ICPTs), using customized CFD commercial code FLUENT ?. The helicoidal coil is taken into account in its actual 3-D shape, showing the effects of its non-axisymmetry on the plasma discharge. Steady state, continuity, momentum and energy equations are solved for argon optically thin plasmas under the assumptions of LTE and laminar flow. The electromagnetic field is obtained by solving the 3-D vector potential equation on a grid extending outside the torch region. In order to evaluate the importance of various 3-D effects on calculated plasma temperature and flow fields, comparisons of our new results with the ones obtainable from conventional 2-D models and from an improved 2-D model that includes 3-D coil effects are presented. The presence of wall temperature hot spots due to plasma discharge displacement from the torch axis is evidenced, while the use of the new 3-D code for optimization of induction coil geometry and plasma gas inlet features is foreseen. Received 5 September 2002 Published online 13 December 2002 RID="a" ID="a"e-mail: colombo@ciram.ing.unibo.it
Keywords:PACS. 52.75.Hn Plasma Torches –   52.65.-y Plasma simulation –   52.80.Pi High-frequency and RF discharges
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