| P(VDF-TrFE)膜悬空结构集成热释电线列研究 |
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| 引用本文： | 李金华,陈王丽华,李坤,蔡忠龙.P(VDF-TrFE)膜悬空结构集成热释电线列研究[J].压电与声光,2000,22(2):104-106. |
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| 作者姓名： | 李金华 陈王丽华 李坤 蔡忠龙 |
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| 作者单位： | 香港理工大学,应用物理系及材料研究中心,香港九龙 |
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| 基金项目： | 香港RGC（大学研究基金会）资金资助项目（Polgu 35／96p
） |
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| 摘 要： | 用聚偏氟乙烯－三氟乙烯「Ｐ（ＶＤＦ－ＴｒＦＥ）」薄膜作１６＊１集成热释电线性阵列的敏感膜,经退火和７５ＫＶ／ｍｍ场强极化后测得其相对介电常数为１２．６,介电损耗约０．０１。为了降低热导和热容,提高探测器的探测灵敏度,用ＫＯＨ作化学腐蚀完全去除了线性阵列下方的硅衬底,形成悬空结构。
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| 关 键 词： | 集成热释电线 阵列 热释电传感器 悬空结构 |
| 修稿时间： | 1999-10-30 |
Pyroelectric Integrated Line ar Array with Suspended P(VDF-TrFE) Membranes as Sensing Elements |
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| LI Jin-hua,H.L.W.CHAN,LI Kun,C.L.CHOY.Pyroelectric Integrated Line ar Array with Suspended P(VDF-TrFE) Membranes as Sensing Elements[J].Piezoelectrics & Acoustooptics,2000,22(2):104-106. |
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| Authors: | LI Jin-hua HLWCHAN LI Kun CLCHOY |
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| Abstract: | P(VDF-TrFE)copolymer film was used for sensing film of 16 X 1 integrated pyroelectric linear array. The film electric constant and dielectric loss are 12. 6 and 0.01,respectively after poling applied 70 kV/mm electric field. In order to reduce the thermal conductivity and heating capacity and increase the detectivity of array, the suspended structure was formed on silicon wafer by chemical etching of KOH. The voltage response,current response and noise of the pyroelectric integrated linear array were measured. The maximum voltage sensitivity and special detectivity are 107 V/W,and 5 X 106 cmHz1/2/W,respectively. |
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| Keywords: | integrated linear array pyroelectric sensors P(VDF-TrFE )film suspended structure |
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